Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.144-151, 2001. Pennington, N.J.. Electrochemical Society
Senzaki, Y. ; Colombo, D. ; Gladfelter, W.L. ; McCormick, F.B.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.933-943, 1997. Pennington, NJ. Electrochemical Society
Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.401-406, 1988. Pittsburgh, Pa.. Materials Research Society
Chen, Samuel ; Gysling, H.J. ; Paz-Pujalt, G.R. ; Blanton, T.N. ; Castro, T. ; Chen, K.M. ; Fictorie, C. ; Gladfelter, W.L. ; Franciosi, A. ; Cohen, P.I. ; Evans, J.F.
Pub. info.:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.173-178, 1993. Pittsburgh, Pa.. Materials Research Society
Xia, B. ; Stesmans, A. ; Chen, F. ; Zhang, Z. ; Gladfelter, W.L. ; Campbell, S.A.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.304-312, 2004. Pennington, NJ. Electrochemical Society