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Extended tuning range RF MEMS variable capacitors using electrostatic and electrothermal actuators

Author(s):
  • Girbau, D. ( Univ. Politecnica de Catalunya (Spain) )
  • Lazaro, A. ( Univ. Politecnica de Catalunya (Spain) )
  • Pradell, L. ( Univ. Politecnica de Catalunya (Spain) )
Publication title:
MEMS/MOEMS Components and Their Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5344
Pub. Year:
2004
Page(from):
59
Page(to):
70
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
Language:
English
Call no.:
P63600/5344
Type:
Conference Proceedings

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