1.

Conference Proceedings
Conference Proceedings
1. Rapid Thermal Process Requirements for the Annealling of Ultrashallow Junctions
Downey, Daniel F. ; Daryanani, Sonu L. ; Meloni, Marylou ; Brown, Kristen M. ; Felch, Susan B. ; Lee, Brian S. ; Marcus, Steven D. ; Gelpey, Jeff
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.299-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. Dopant Diffusion Simulation in Thin-SOI
Li, Hong-Jyh ; Tichy, Robin ; Ross, Jonathon ; Gelpey, Jeff ; Stotts, Ben ; Galloway, Heather ; Larson, Larry
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.179-184,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765