Downey, Daniel F. ; Daryanani, Sonu L. ; Meloni, Marylou ; Brown, Kristen M. ; Felch, Susan B. ; Lee, Brian S. ; Marcus, Steven D. ; Gelpey, Jeff
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Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.299-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Li, Hong-Jyh ; Tichy, Robin ; Ross, Jonathon ; Gelpey, Jeff ; Stotts, Ben ; Galloway, Heather ; Larson, Larry
Pub. info.:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.179-184, 2003. Warrendale, Pa.. Materials Research Society