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Conference Proceedings

1. THE PROPERTIES OF A PLASMA DEPOSITED CANDIATE INSULATOR FOR FUTURE MULTILEVEL INTECONNECTS TECHNOLOGY

Gelatos, A. V. ; Mogab, C. J. ; Saha, N. C. ; Parikh, N.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.347-354, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. THE ROLE OF LATTICE RELAXATION IN THE COMPETITION BETWEEN OPTICAL AND THERMAL TRANSITIONS FROM GAP STATES IN HYDROGENATED AMORPHOUS SILICON

Gelatos, A. V. ; Cohen, J. D. ; Harbison, J. P.

Pub. info.:	Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.33-38, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	95

Conference Proceedings

3. CAPACITANCE STUDIES OF METASTABLE STATES IN LIGHT-SOAKED, QUENCH-COOLED, AND BIAS-ANNEALED a-TYPE HYDROGENATED AMORPHOUS SILICON

Leen, T. M. ; Cohen, J. D. ; Gelatos, A. V.

Pub. info.:	Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.707-712, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	192

Conference Proceedings

4. PASSIVATION OF SILICON DIOXIDE SURFACE HYDROXYL GROUPS TO CONTROL SELECTIVITY DURING CHEMICAL VAPOR DEPOSITION OF COPPER FROM COPPER(I) COMPOUNDS

Jain, Ajay ; Farkas, J. ; Kodas, T. T. ; Hampden-Smith, M. J. ; Gelatos, A. V. ; Marsh, R. ; Mogab, C. J.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.105-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

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