1.

Conference Proceedings

Conference Proceedings
Maenhoudt,M. ; Verhaegen,S. ; Ronse,K. ; Flagello,D.G. ; Geh,B. ; Kaiser,W.M.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.347-357,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings

Conference Proceedings
Schmidt,R.T. ; Spence,C.A. ; Capodieci,L. ; Krivokapic,Z. ; Geh,B. ; Flagello,D.G.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.15-24,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings

Conference Proceedings
Flagello,D.G. ; Laan,H.van der ; Schoot,J.van ; Bouchoms,I. ; Geh,B.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.162-175,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
4.

Conference Proceedings

Conference Proceedings
Flagello,D.G. ; Geh,B.
Pub. info.: Optical Microlithography IX.  Part2  pp.788-798,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
5.

Conference Proceedings

Conference Proceedings
Schoot,J.B.van ; Seong,N. ; Geh,B. ; Burkhardt,M. ; Graupner,P. ; Reisinger,G. ; Rubingh,R. ; Suddendorf,M. ; Finders,J. ; Rikkers,E.
Pub. info.: Optical Microlithography XIV.  4346  pp.229-240,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
6.

Conference Proceedings

Conference Proceedings
Flagello,D.G. ; Klerk,J.de ; Davies,G. ; Rogoff,R. ; Geh,B. ; Arnz,M. ; Wegmann,U. ; Kraemer,M.
Pub. info.: Optical Microlithography X.  pp.672-685,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051