1.

Conference Proceedings

Conference Proceedings
Ueda, O. ; Nauka, K. ; Lagowski, J. ; Gatos, H.C.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.21-26,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Technical Paper

Technical Paper
Gatos, H.C.
Pub. info.: NASA Technical Reports.  (NASA-CR-177268),  pp.1-36,  1986.  National Aeronautics and Space Administration