1.
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Conference Proceedings
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Garza,C.M. ; Conley,W. ; Roman,B.J. ; Schippers,M. ; Foster,J. ; Baselmans,J. ; Cummings,K.D. ; Flagello,D.G.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.36-44, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
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2.
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Conference Proceedings
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Conley,W. ; Garza,C.M. ; Dusa,M.V. ; Socha,R.J. ; Bendik,J.J. ; Mack,C.A.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.251-258, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
3.
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Conference Proceedings
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Mason,M.E. ; Soper,R.A. ; Garza,C.M.
Pub. info.: |
Optical Microlithography IX. Part2 pp.847-858, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
2726 |
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