1.
Conference Proceedings
Postnikov, S.V. ; Lucas, K. ; Garza, C.M. ; Wimmer, K. ; LaCour, P. ; Word, J.C.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA . pp.160-171, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
2.
Conference Proceedings
Garza, C.M. ; Wu, W. ; Roman, B.J. ; Mangat, P.J.S. ; Nordquist, K.J. ; Dauksher, W.J.
Pub. info.:
Optical Microlithography XVI . Part Two pp.979-985, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
3.
Conference Proceedings
Garza, C.M. ; Warrick, S.P. ; Seligman, G.S. ; Zavyalova, L.V. ; Zwol, A. ; Foster, J.
Pub. info.:
Optical Microlithography XVI . Part Three pp.1432-1440, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
4.
Conference Proceedings
Smith, B.W. ; Conley, W. ; Garza, C.M. ; Meute, J. ; Miller, D.A. ; Rich, G.K. ; Graffenberg, V. ; Dean, K.R. ; Patel, S. ; Ford, A. ; Foster, J. ; Moers, M.H. ; Cummings, K.D. ; Webb, J.E. ; Dewa, P.G. ; Zerrade, A. ; McDonald, S.S. ; Hughes, G.P. ; Dirksen, P.
Pub. info.:
Optical Microlithography XV . Part Two pp.1635-1643, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
5.
Conference Proceedings
Garza, C.M. ; Bierschenk, T.
Pub. info.:
Optical Microlithography XVII . pp.527-536, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
6.
Conference Proceedings
Garza, C.M. ; Conley, W.E.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.294-301, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376