1.

Conference Proceedings
Conference Proceedings
1. Impact of wavefront errors on low k1 processes at extremely high NA
Graeupner, P. ; Garreis, R.B. ; Goehnermeier, A. ; Heil, T. ; Lowisch, M. ; Flagello, D.G.
Pub. info.: Optical Microlithography XVI.  Part One  pp.119-130,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Solutions for printing sub-100-nm contacts with ArF
Graeupner, P. ; Goehnermeier, A. ; Lowisch, M. ; Garreis, R.B. ; Flagello,D.G. ; Hansen, S.G. ; Socha, R.J. ; Koehler, C.
Pub. info.: Optical Microlithography XV.  Part One  pp.503-514,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691