1.

Conference Proceedings
Conference Proceedings
1. Catadioptric lens design: the breakthrough to hyper-NA optics [6154-75]
Kneer, B. ; Graupner, P. ; Garreis, R. ; Klasges, R. ; Feldmann, H.
Pub. info.: Optical Microlithography XIX.  pp.615420-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Predictive modeling of advanced illumination pupils used as imaging enhancement for low-k1 applications
Heil, T. ; Graupner, P. ; Garreis, R. ; Egger, R. ; Brotsack, M. ; Finders, J. ; Hansen, S.
Pub. info.: Optical Microlithography XVII.  pp.344-356,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. Optical lithography in the sub-50-nm regime
Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.: Optical Microlithography XVII.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377