1.

Conference Proceedings
Conference Proceedings
1. Nitrogen implantation: reverse short channel effects improvement and its drawbacks
Lee,T.K. ; Nga,Y.A. ; Liu,P.C. ; Gan,C.H. ; Zhang,Y.Q.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.304-311,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings
Conference Proceedings
2. Comprehensive study of indium-implantation-induced damages in 0.25-μm MOSFETs
Liao,H. ; Lim,L. ; Lowrie,A. ; Gan,C.H. ; Redford,M.
Pub. info.: Microelectronic Yield, Reliability, and Advanced Packaging.  pp.79-84,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4229
3.

Conference Proceedings
Conference Proceedings
3. Stress-induced leakage currents of CMOS ULSI devices with shallow trench isolation
Sundaresan,R. ; Gan,C.H. ; Peidous,I.V.
Pub. info.: Microelectronic Device Technology III.  pp.224-233,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881