1.

Conference Proceedings
Conference Proceedings
1. Continuum model of shot noise and line edge roughness
Gallatin,G.M.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.123-132,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
2.

Conference Proceedings
Conference Proceedings
2. Space-charge results from the SCALPEL proof-of-concept system
Liddle,J.A. ; Blakey,M.I. ; Gallatin,G.M. ; Knurek,C.S. ; Mkrtchyan,M.M. ; Novembre,A.E. ; Waskiewicz,W.K.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.180-193,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. Micrascan III:0.25-ｦﾌm resolution step-and-scan system
Williamson,D.M. ; McClay,J.A. ; Andresen,K.W. ; Gallatin,G.M. ; Himel,M.D. ; Ivaldi,J. ; Mason,C. ; McCullough,A.W. ; Otis,C. ; Shamaly,J.J. ; Tomczyk,C.
Pub. info.: Optical Microlithography IX.  Part2  pp.780-786,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
4.

Conference Proceedings
Conference Proceedings
4. Micrascan adaptive x-cross correlative independent off-axis modular(AXIOM)alignment system
Drazkiewicz,S. ; Gallatin,G.M. ; Lyons,J.
Pub. info.: Optical Microlithography IX.  Part2  pp.886-899,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726