1.

Conference Proceedings
Conference Proceedings
1. Effect of resin molecular weight on novolak dissolution
Shih,H.-Y. ; Zhuang,H. ; Reiser,A. ; Gallagher-Wetmore,P.M.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1052-1060,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings
Conference Proceedings
2. Block and random copolymer resists designed for 193-nm lithography and environmentally friendly supercritical CO2 development
Gabor,A.H. ; Allen,R.D. ; Gallagher-Wetmore,P.M. ; Ober,C.K.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.410-417,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
3.

Conference Proceedings
Conference Proceedings
3. Selectively esterified novolac resins:a study of resist properties as a function of novolac molecular weight and composition
Jeffries,A.T.III ; Brzozowy,D.J. ; Beauchemin,B.T. ; Naiini,A.A. ; Fitzgerald,E.A. ; Gallagher-Wetmore,P.M.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.469-480,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
4.

Conference Proceedings
Conference Proceedings
4. Novel combination of photoactive species:photoresists formed from selectively esterified novolacs and polyfunctional photoactive compounds
III,A.T.Jeffries ; Brzozowy,D.J. ; Naiini,A.A. ; Gallagher-Wetmore,P.M.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.746-756,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
5.

Conference Proceedings
Conference Proceedings
5. Structure and property relationships of fractionated novolac resins
Chen,K.-J.R. ; Kwong,R.W. ; Jordhamo,G. ; Allen,R.D. ; Gallagher-Wetmore,P.M.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.596-607,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
6.

Conference Proceedings
Conference Proceedings
6. Supercritical fluid processing:opportunities for new resist materials and processes
Gallagher-Wetmore,P.M. ; Ober,C.K. ; Gabor,A.H. ; Allen,R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.289-299,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725