1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL CHARACTERIZATION OF ION IMPLANTED, THERMALLY ANNEALED TiN FILMS ACTING AS DIFFUSION BARRIERS ON SHALLOW JUNCTION SILICON DEVICES
Armigliato, A. ; Finetti, M. ; Gabilli, E ; Guerri, S. ; Ostoja, P. ; Sabato, G. ; Scorzoni, A.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.183-188,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
2.

Conference Proceedings
Conference Proceedings
2. A SELF-ANNEALING TECHNIQUE FOR SIMULTANEOUS TITANIUM SILICIDE AND N+ /P JUNCTION FORMATION
Finetti, Manuela ; Gabilli, E ; Lotti, R. ; Lulli, G. ; Merli, P. G. ; Nipoti, R. ; Vittori, Antisari M.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.177-182,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45