1.

Conference Proceedings
Conference Proceedings
1. Lithography and yield sensitivity analysis of SRAM scaling for the 32nm node
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
2.

Conference Proceedings
Conference Proceedings
2. AIMS-45 image validation of contact hole patterns affer inverse lithography at NA 1.35
E. Hendrickx ; R. Birkner ; M. Kempsell ; A. Tritchkov ; G. Vandenberghe
Pub. info.: Photomask technology 2008.  1  pp.71221E-1-71221E-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
3.

Conference Proceedings
Conference Proceedings
3. 60nm half pitch contact layer printing: exploring the limits at 1.35NA lithography
J. Bekaert ; E. Hendrickx ; G. Vandenberghe
Pub. info.: Optical Microlithography XXI.  2  pp.69243A-1-69243A-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
4.

Conference Proceedings
Conference Proceedings
4. Tool-to-tool optical proximity effect matching
L. Van Look ; J. Bekaert ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: Optical Microlithography XXI.  2  pp.69241Q-1-69241Q-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
5.

Conference Proceedings
Conference Proceedings
5. Experimental proximity matching of ArF scanners
J. Bekaert ; L. Van Look ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: Lithography Asia 2008.  2  pp.714027-1-714027-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140