1.
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Conference Proceedings
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A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: |
Design for manufacturability through design-process integration. 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6521 |
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2.
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Conference Proceedings
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E. Hendrickx ; R. Birkner ; M. Kempsell ; A. Tritchkov ; G. Vandenberghe
Pub. info.: |
Photomask technology 2008. 1 pp.71221E-1-71221E-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
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3.
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Conference Proceedings
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J. Bekaert ; E. Hendrickx ; G. Vandenberghe
Pub. info.: |
Optical Microlithography XXI. 2 pp.69243A-1-69243A-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
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4.
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Conference Proceedings
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L. Van Look ; J. Bekaert ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: |
Optical Microlithography XXI. 2 pp.69241Q-1-69241Q-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
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5.
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Conference Proceedings
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J. Bekaert ; L. Van Look ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: |
Lithography Asia 2008. 2 pp.714027-1-714027-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7140 |
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