1.

Conference Proceedings
Conference Proceedings
1. High-Rate Reactive Deposition of Titania from Rotating Cylindrical Magnetrons with Plasma Emission Monitoring
P. Greene ; J. Rietzel ; S. Nadel ; J. Strümpfel ; C. May ; G. Teschner
Pub. info.: 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California.  pp.209-213,  2003.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 46
2.

Conference Proceedings
Conference Proceedings
2. Advanced Rotatable Magnetron Module Designed for Large Area Glass Coaters
J. Brückner ; G. Teschner ; F. Milde ; J. Krause
Pub. info.: 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado.  pp.265-269,  2005.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 48
3.

Conference Proceedings
Conference Proceedings
3. Process Development for Large Area Reactive Magnetron Sputtering
C. May ; F. Milde ; G. Teschner
Pub. info.: 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida.  pp.153-158,  2002.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 45
4.

Conference Proceedings
Conference Proceedings
4. Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating
F. Milde ; D. Schulze ; G. Teschner ; P. Wiedemuth ; T. Rettich
Pub. info.: 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania.  pp.375-381,  2001.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 44
5.

Conference Proceedings
Conference Proceedings
5. Gas Inlet Systems for Large Area Linear Magnetron Sputtering Sources
F. Milde ; G. Teschner ; C. May
Pub. info.: 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania.  pp.204-209,  2001.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 44