Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.702517-1-702517-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.70250M-1-70250M-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
V. E. Shunkov ; M. S. Gorbunov ; G. I. Zebrev ; B. V. Vasilegin
Pub. info.:
Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.702516-1-702516-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering