1.

Conference Proceedings
Conference Proceedings
1. LOW-TEMPERATURE HETEROEPITAXY OF β-SiC ON Si (111) SUBSTRATES
Eshita, T. ; Suzuki, T. ; Hara, T. ; Mieho, F. ; Furumura, Y. ; Maeda, M. ; Sugii, T. ; Ito, T.
Pub. info.: Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.357-362,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 116
2.

Conference Proceedings
Conference Proceedings
2. In-Situ H2 Pretreatment An Thermal Nitridation For Ultrathin Silicon Nitride Capacitors
Kuramae, M. ; Hataishi, O. ; Mieno, P. ; Nakamura, M. ; Suzuki, Y. ; Nomura, H. ; Shimizu, A. ; Furumura, Y.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.450-457,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
3.

Conference Proceedings
Conference Proceedings
3. RuO2 THIN FILMS AS BOTTOM ELECTRODES FOR HIGH DIELECTRIC CONSTANT MATERIALS
Yoshikawa, K. ; Kimura, T. ; Noshiro, H. ; Ohtani, S. ; Yamada, M. ; Furumura, Y.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.511-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343