1.

Conference Proceedings

Conference Proceedings
Fukuhara,N. ; Haraguchi,T. ; Kanayama,K. ; Matsuo,T. ; Takeuchi,S. ; Tomiyama,K. ; Saga,T. ; Hattori,Y. ; Ooshima,T. ; Otaki,M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.979-986,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings

Conference Proceedings
Onodera,T. ; Matsuo,T. ; Nakazawa,K. ; Miyazaki,J. ; Ogawa,T. ; Morimoto,H. ; Haraguchi,T. ; Fukuhara,N. ; Otaki,M. ; Takeuchi,S.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.337-343,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings

Conference Proceedings
Fukushima,Y. ; Fukuhara,N. ; Ueyama,K.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.138-145,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
4.

Conference Proceedings

Conference Proceedings
Ii,T. ; Saga,T. ; Hattori,Y. ; Ohshima,T. ; Otaki,M. ; Iwakata,M. ; Haraguchi,T. ; Kanayama,K. ; Yamazaki,T. ; Fukuhara,N. ; Matsuo,T.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.297-308,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
5.

Conference Proceedings

Conference Proceedings
Kanayama,K. ; Haraguchi,T. ; Yamazaki,T. ; Ii,T. ; Matsuo,T. ; Fukuhara,N. ; Saga,T. ; Hattori,Y. ; Ooshima,T. ; Otaki,M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.147-154,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409