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19 results

Conference Proceedings

1. Nikon EB Stepper: the latest development status

Suzuki,K. ; Fujiwara,T. ; Hada,K. ; Hirayanagi,N. ; Kawata,S. ; Morita,K. ; Okamoto,K. ; Okino,T. ; Shimizu,S. ; Yahiro,T. ; Yamamoto,H.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.80-87, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

2. Second-order nonlinearity and structural change in UV-poled glass

Fujiwara,T. ; Ohama,M. ; Matsumoto,S. ; Ikushima,A.J.

Pub. info.:	Doped fiber devices II : 2-3 November, 1998, Boston, Massachusetts. pp.94-101, 1998. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3542

Conference Proceedings

3. Data of scattered electron characteristics in 1OO-kV EB stepper

Morita,K. ; Yahiro,T. ; Shimizu,S. ; Yamamoto,H. ; Hirayanagi,N. ; Fujiwara,T. ; Suzuki,S. ; Shimizu,H. ; Kawata,S. ; Okino,T. ; Suzuki,K.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.703-712, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

Conference Proceedings

4. Investigation of proximity effect correction in electron projection lithography(EPI)

Okino,T. ; Suzuki,K. ; Okamoto,K. ; Kawata,S. ; Uchikawa,K. ; Suzuki,S. ; Shimizu,S. ; Fujiwara,T. ; Yamada,A. ; Kamijo,K.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.235-244, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

Conference Proceedings

5. Nikon EB stepper:its system concept and countermeasures for critical issues

Suzuki,K. ; Fujiwara,T. ; Hada,K. ; Hirayanagi,N. ; Kawata,S. ; Morita,K. ; Okamoto,K. ; Okino,T. ; Shimizu,S. ; Yahiro,T.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.214-224, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

Conference Proceedings

6. Development of advanced ArF resist using alicyclic methacrylate copolymer:the optimum quenchers for this copolymer

Wakisaka,Y. ; Fujiwara,T. ; Tooyama,M. ; Kuwano,H. ; Nishida,K.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.1088-1099, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

7. Highly accurate CD control at stitching region for electron-beam projection lithography

Fujiwara,T. ; Irita,T. ; Shimizu,S. ; Yamamoto,H. ; Suzuki,K.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.727-735, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

8. Electronic Structure in Approximants of Stable Quasicrystals

Laissardiere,G.Trambly de ; Fujiwara,T.

Pub. info.:	Quasicrystals and imperfectly ordered crystals. pp.417-426, 1994. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	150-151

Conference Proceedings

9. Electronic Transport of 2-D Penrose Lattice with Random Phason Strain

Yamamoto,S. ; Fujiwara,T.

Pub. info.:	Quasicrystals and imperfectly ordered crystals. pp.457-464, 1994. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	150-151

10.

Conference Proceedings

10. Electronic Structure and Electron Transport in Quasicrystals

Fujiwara,T. ; Laissardiere,G.Trambly de ; Yamamoto,S.

Pub. info.:	Quasicrystals and imperfectly ordered crystals. pp.387-394, 1994. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	150-151

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Author: Fujiwara,T.