Low-voltage-point source microscope for interferometry
- Author(s):
- Frost, B.G. ( Univ. of Tennessee/Knoxville (USA) )
- Joy, D.C.
- Thesen, A.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 576
- Page(to):
- 583
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |
Kluwer Academic Publishers |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
THE FIELD EMISSION GUN SCANNING ELECTRON MICROSCOPE - HIGH RESOLUTION AT LOW BEAM ENERGIES
MRS - Materials Research Society |