1.

Conference Proceedings
Conference Proceedings
1. Low-polarization-dependence high-efficiency WDM
Popov, E. ; Hoose, J. ; Frankel, R. ; Keast, C. ; Fritze, M. ; Fan, T. Y. ; Yost, D. ; Rabe, S.
Pub. info.: Physics, theory, and applications of periodic structures in optics II : 5-7 August 2003, San Diego, California, USA.  pp.82-88,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5184
2.

Conference Proceedings
Conference Proceedings
2. Investigation of the physical and practical limits of dense-only phase-shift lithography for circuit feature definition
Tyrrell, B. ; Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.503-516,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
3.

Conference Proceedings
Conference Proceedings
3. The improvement of the overlay accuracy using the reticle distortion correction for EPL technologies
Fritze, M. ; Tyrrell, B. ; Fedynyshyn, T. ; Rothschild, M. ; Brooker, P.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.483-490,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
4.

Conference Proceedings
Conference Proceedings
4. Minimizing mask complexity for advanced optical lithography
Fritze, M. ; Tyrrell, B.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.30-38,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
5.

Conference Proceedings
Conference Proceedings
5. Dense only phase-shift template lithography
Fritze, M. ; Tyrrell, B. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.15-29,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
6.

Conference Proceedings
Conference Proceedings
6. Minimization of image placement errors in chromeless phase-shift mask lithography
Fritze, M. ; Tyrrell, B. ; Cann, S.G. ; Carney, C. ; Blachowicz, B.A. ; Brzozowy, D. ; Kocab, T. ; Bowdoin, S. ; Rhyins, P.D. ; Progler, C.J. ; Martin, P.
Pub. info.: Optical Microlithography XV.  Part One  pp.426-436,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
7.

Conference Proceedings
Conference Proceedings
7. Limits of strong phase-shift patterning for device research
Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Yost, D. ; Snyder, J.P. ; Kasprowicz, B.S. ; Eynon, B.G. ; Liu, H.-Y.
Pub. info.: Optical Microlithography XVI.  Part One  pp.327-343,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040