1.

Conference Proceedings
Conference Proceedings
1. PULSED EXCIMER LASER ABLATION DEPOSITION OF BORON NITRIDE ON Si(100) SUBTRATES
Friedmann, T.A. ; McCarty, K.F. ; Klaus, E.J. ; Boehme, D. ; Clift, W.M. ; Johnsen, H.A. ; Mills, M.J. ; Ottesen, D.K. ; Stulen, R.H.
Pub. info.: Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.593-598,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 242
2.

Conference Proceedings
Conference Proceedings
2. ION-ASSISTED PULSED LASER DEPOSITION OF CUBIC BORON NITRIDE ON Si (100) SUBSTRATES
Friedmann, T.A. ; McCarty, K.F. ; Klaus, E.J. ; Johnsen, H.A. ; Medlin, D.L. ; Mills, M.J. ; Ottesen, D.K. ; Stulen, R.H.
Pub. info.: Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.507-512,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 285
3.

Conference Proceedings
Conference Proceedings
3. Developing a New Material for MEMS: Amorphous Diamond
Sullivan, J.P. ; Friedmann, T.A. ; Boer, M.P. de ; Van, D.A. La ; Hoflfelder, R.J. ; Ashby, C.I.H. ; Dugger, M.T. ; Mitchell, M. ; Dunn, R.G. ; Magerkurth, A.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
4.

Conference Proceedings
Conference Proceedings
4. Young's Modulus, Poisson's Ratio, and Nanoscale Deformation Fields of MEMS Materials
Chasiotis, I. ; Cho, S.W. ; Friedmann, T.A. ; Sullivan, J.P.
Pub. info.: Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.461-466,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 795
5.

Conference Proceedings
Conference Proceedings
5. Measurement of a laterally deformable optical MEMS grating transducer
Carr, D.W. ; Keeler, B.E.N. ; Sullivan, J.P. ; Friedmann, T.A. ; Wendt, J.R.
Pub. info.: MOEMS and Miniaturized Systems IV.  pp.56-63,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5346
6.

Conference Proceedings
Conference Proceedings
6. Development of an amorphous diamond (a-D) RF MEMS switch
Webster, J.R. ; Dyck, C.W. ; Friedmann, T.A. ; Sullivan, J.P. ; Nordquist, C.D. ; Carton, A.J. ; Kraus, G.M. ; Schmidt, G.D.
Pub. info.: MEMS/MOEMS Components and Their Applications.  pp.71-78,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5344