1.

Conference Proceedings
Conference Proceedings
1. Integration technology (Invited Paper)
French,P.J. ; Sarro,P.M.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.60-71,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
2.

Conference Proceedings
Conference Proceedings
2. Macroporous silicon formation for micromachining
Ohji,H. ; Lahteenmaki,S. ; French,P.J.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.189-197,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
3.

Conference Proceedings
Conference Proceedings
3. Influence of processes and selective bonding technology
Jiao,J. ; Berthold,A. ; Vellekoop,M.J. ; French,P.J.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.245-252,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
4.

Conference Proceedings
Conference Proceedings
4. Integration of MEMS devices
French,P.J.
Pub. info.: Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.55-64,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3894
5.

Conference Proceedings
Conference Proceedings
5. Reduction of uncertainty in the measurement of the piezoresistive coefficients of silicon with a three-element rosette
Creemer,J.F. ; French,P.J.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.392-402,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
6.

Conference Proceedings
Conference Proceedings
6. New developments in the integration of micromachined sensors
Sarro,P.M. ; French,P.J. ; Gennissen,P.T.J.
Pub. info.: Micromachined devices and components II : 14-15 October 1996, Austin, Texas.  pp.26-36,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2882
7.

Conference Proceedings
Conference Proceedings
7. Strain effects in multilayers
Ashruf,C.M.A. ; French,P.J. ; de Boer,C. ; Sarro,P.M.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.149-159,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
8.

Conference Proceedings
Conference Proceedings
8. Applications of bipolar compatible epitaxial polysilicon
Gennissen,P.T.J. ; French,P.J.
Pub. info.: Micromachined devices and components II : 14-15 October 1996, Austin, Texas.  pp.59-65,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2882
9.

Conference Proceedings
Conference Proceedings
9. Integration of MEMS devices
French,P.J.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.39-48,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891
10.

Conference Proceedings
Conference Proceedings
10. Integration of MEMS devices
French,P.J.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.39-48,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892