1.

Conference Proceedings

Conference Proceedings
Freeman, G.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.196-204,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.143-146,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings

Conference Proceedings
Freeman, G. ; Schonenberg, K. ; Ahlgren, D. ; Jeng, S-J. ; Nguyen-Ngoc, D. ; Stein, K. ; Colavito, D. ; Subbanna, S. ; Harame, D. ; Meyerson, B.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.19-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
4.

Technical Paper

Technical Paper
Freeman, G. ; Lefebvre, A. H.
Pub. info.: NASA Technical Reports.  (NASA-CP-2309),  pp.1-12,  1984.  National Aeronautics and Space Administration