The Effect of Ge Content in MBE Si_(1-x)Ge_x on the Evolution of 311 Defects
- Author(s):
Crosby, Robert Frazer, Jackie Jones, K.S. Law, M.E. Larsen, A. Nylandsted Hansen, J. Lundsgaard - Publication title:
- Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 717
- Pub. Year:
- 2002
- Page(from):
- 27
- Page(to):
- 32
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996533 [1558996532]
- Language:
- English
- Call no.:
- M23500/717
- Type:
- Conference Proceedings
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