Wilson, J.M. ; Bashirullah, R. ; Nackashi, D.P. ; Winick, D.A. ; Duewer, B.E. ; Franzon, P.D.
Pub. info.:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.186-197, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Duewer, B.E. ; Winick, D.A. ; Oberhofer, A.E. ; Muth, J. ; Franzon, P.D.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.196-204, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering