1.

Conference Proceedings
Conference Proceedings
1. Influence of the Standard CMOS Procesing on Ta2O5 Gate Dielectric Transistors Performance
Bersuker, G. ; Gilmer, M. ; Zeitzoff, P.M. ; Brown, G.A. ; Jackson, M.D. ; Shaapur, F. ; Foran, B. ; Huff, H.R.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.178-186,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
2.

Conference Proceedings
Conference Proceedings
2. Electroplated Cu Recrystallization in Damascene Structures at Elevated Temperatures
Jiang, Q-T. ; Thomas, M. E. ; Bersuker, G. ; Foran, B. ; Mikkola, R. ; Carpenter, B. ; Ormando, J.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.429-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
3.

Conference Proceedings
Conference Proceedings
3. Experimental Study of Etched Back Thermal Oxide for Optimization of the Si/High-k Interface
Barnett, Joel ; Moumen, N. ; Gutt, J. ; Gardner, M. ; Huffman, C. ; Majhi, P. ; Peterson, J.J. ; Gopalan, S. ; Foran, B. ; Li, H.-J. ; Lee, B.H. ; Bersuker, G. ; Zeitzoff, P.M. ; Brown, G.A. ; Lysaght, P. ; Young, C. ; Murto, R.W. ; Huff, H.R.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.841-846,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
4.

Conference Proceedings
Conference Proceedings
4. The Pore Structure, Property, and Performance of a Spin-on Porous Low-k Dielectric
Liu, Y. ; Foran, B. ; Gidley, D. ; Wu, W-L. ; Shirataki, H. ; Hanahata, H.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.204-209,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10