1.

Conference Proceedings

Conference Proceedings
Chow, Y.F. ; Foo, T.H. ; Shen, L. ; Pan, J.S. ; Du, A. Y. ; Xing, Z.X. ; Yuan, Y.J. ; Li, C.Y. ; Kumar, R. ; Foo, P.D.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.563-568,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Conference Proceedings

Conference Proceedings
Chang, C.K. ; Tsang, C.F. ; Nguyen, V. ; Zhang, Q. ; Foo, T.H.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.27-33,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26