1.

Conference Proceedings

Conference Proceedings
Kang, J.M. ; Wu, S. ; Selvaraj, T. ; Foo, P.D.
Pub. info.: Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 671
2.

Conference Proceedings

Conference Proceedings
Zhao, S.P. ; Koh, L.T. ; Zhang, D.H. ; Loh, S.A. ; Liew, G.M. ; Li, C.Y. ; Woo, Y.K. ; Cheng, C.K. ; Foo, P.D.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.123-130,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
3.

Conference Proceedings

Conference Proceedings
Loh, S.W. ; Zhang, D.H. ; Li, C.Y. ; Liu, R. ; Wee, A.T.S. ; Foo, P.D. ; Xie, Joseph ; Prasad, K. ; Tan, C.M. ; Lee, Y.K.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.116-122,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
4.

Conference Proceedings

Conference Proceedings
Chow, Y.F. ; Foo, T.H. ; Shen, L. ; Pan, J.S. ; Du, A. Y. ; Xing, Z.X. ; Yuan, Y.J. ; Li, C.Y. ; Kumar, R. ; Foo, P.D.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.563-568,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
5.

Conference Proceedings

Conference Proceedings
Prasad, K. ; Yuan, X.L. ; Tan, C.M. ; Zhang, D.H. ; Li, C. Y. ; Wang, S.R. ; Yuan, S.Y.J. ; Xie, J.L. ; Gui, D. ; Foo, P.D.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.395-400,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716