Liebmann, L.W. ; Barish, A.E. ; Baum, Z. ; Bonges, H.A. ; Bukofsky, S.J. ; Fonseca, C.A. ; Halle, S.D. ; Northrop, G.A. ; Runyon, S.L. ; Sigal, L.
Pub. info.:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.20-29, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Liebmann, L.W. ; Lund, J. ; Graur, I.C. ; Heng, F.-L. ; Fonseca, C.A. ; Culp, J. ; Gabor, A.H.
Pub. info.:
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.262-273, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Liebmann, L.W. ; Northrop, G.A. ; Culp, J. ; Sigal, L. ; Barish, A. ; Fonseca, C.A.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.1-14, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering