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16 results

Conference Proceedings

1. *LOW TEMPERATURE SYNTHESIS OF SILICON OXIDE AND OXYNITRIDE FILMS BY REACTIVE LASER ABLATION

Fogarassy, E. ; Fuchs, C. ; Slaoui, A. ; De Unamuno, S. ; Stoquert, J.-P. ; Marine, W. ; Lang, B.

Pub. info.:	Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.319-330, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	285

Conference Proceedings

2. PHOSPHORUS AND BORON DOPING OF SILICON THIN FILMS USING ArF EXCIMER LASER

Slaoui, A. ; Pattyn, H. ; Fogarassy, E. ; De Unamuno, S. ; Stuck, R.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.389-396, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

3. A COMPARISON OF THE GAS PHASE PROCESSES RESULTING FROM SiH4 AND Si2H6 PHOTODISSOCIATION WITH A PULSED ArF EXCIMER LASER

Boch, E. ; Fuchs, C. ; Fogarassy, E. ; Siffert, P.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.195-200, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

4. BORON DOPING OF SILICON USING EXCIMER LASERS

Slaoui, A. ; Foulon, F. ; Bianconi, M. ; Correra, L. ; Nipoti, R. ; Stuck, R. ; Unamuno, S. ; Fogarassy, E. ; Nicoletti, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.591-596, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

5. TWO-PHOTON ABSORPTION CROSS SECTION FOR SILANE UNDER PULSED ArF (193 nm) EXCIMER LASER IRRADIATION

Fuchs, C. ; Boch, E. ; Fogarassy, E. ; Aka, B. ; Siffert, P.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.361-366, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

6. LASER ASSISTED DEPOSITION OF THIN BiSr-CaCuO FILMS

Cheene, a. ; Perriere, J. ; Kerherve, F. ; Hauchecorne, G. ; Fogarassy, E. ; Fuchs, C.

Pub. info.:	Laser ablation for materials synthesis : symposium held April 19-20, 1990, San Francisco, California, U.S.A.. pp.229-234, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	191

Conference Proceedings

7. ArF EXCIMER LASER DOPING INTO AMORPHOUS SILICON THIN FILMS

Elliq, M. ; Slaoui, A. ; Fogarassy, E. ; Pattyn, H. ; Struck, R. ; Siffert, P.

Pub. info.:	Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.739-744, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	219

Conference Proceedings

8. COMPARISON OF THE PROCESSES INDUCED BY MERCURY LAMP AND ArF EXCIMER LASER PHOTOASSISTED CVD OF a-Si: H FILMS

Fuchs, C. ; Fogarassy, E.

Pub. info.:	Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.195-200, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	75

Conference Proceedings

9. STUDY OF Si02 FORMATION BY PLASMA TREATMENT OF SiO THIN FILMS

Perriere, J. ; Pelloie, B. ; Rochet, F. ; Fogarassy, E. ; Slaoui, A. ; Dufour, G. ; Roulet, H. ; Froment, M.

Pub. info.:	SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.85-90, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	105

10.

Conference Proceedings

10. OPTICAL PROPERTIES OF LASER INDUCED HEAVILY DOPED SILICON LAYERS

Slaoui, A. ; Fogarassy, E. ; Siffert, P. ; Morphange, J. F. ; Balkanski, M.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.159-166, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

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