1.

Conference Proceedings
Conference Proceedings
1. High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS
Fleming,J.G. ; Mani,S.S. ; Lin,S.-Y.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.183-188,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
2.

Conference Proceedings
Conference Proceedings
2. 3D silicon photonic lattices:cornerstone of an emerging photonics revolution
Fleming,J.G. ; Lin,S.-Y.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.9-18,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
3.

Conference Proceedings
Conference Proceedings
3. 3D silicon photonic lattices:cornerstone of an emerging photonics revolution
Fleming,J.G. ; Lin,S.-Y.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.9-18,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
4.

Conference Proceedings
Conference Proceedings
4. Efficient imaging with integrated optoelectronics: I. Overview and some applications
Porumbescu,A.M. ; Ritter,G.X. ; Schmalz,M.S. ; Wilson,J.N. ; Hietala,V.M. ; Fleming,J.G.
Pub. info.: Design and manufacturing of WDM devices : 4-5 November 1997, Dallas, Texas.  pp.184-191,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3234
5.

Conference Proceedings
Conference Proceedings
5. Characterization and application of deep Si trench etching
Fleming,J.G. ; Barron,C.C.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.73-79,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
6.

Conference Proceedings
Conference Proceedings
6. W-coating for MEMS
Mani,S.S. ; Fleming,J.G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.150-157,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
7.

Conference Proceedings
Conference Proceedings
7. 3D silicon photonic lattices:cornerstone of an emerging photonics revolution
Fleming,J.G. ; Lin,S.-Y.
Pub. info.: Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California.  pp.9-18,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3879
8.

Conference Proceedings
Conference Proceedings
8. Current status of three-dimensional silicon photonic crystals operating at infrared wavelengths
Lin,S.-Y. ; Fleming,J.G. ; Sigalas,M.M. ; Biswas,R. ; Ho,K.M.
Pub. info.: Physics and simulation of optoelectronic devices VIII : 24-28 January 2000, San Jose, USA.  Part2  pp.688-693,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3944
9.

Conference Proceedings
Conference Proceedings
9. Novel silicon fabrication process for high-aspect-ratio micromachined parts
Fleming,J.G. ; Barron,C.C.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.185-190,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639
10.

Conference Proceedings
Conference Proceedings
10. Combining the best of bulk and surface micromachining using Si {111} substrates
Fleming,J.G.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.162-168,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511