Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1034-1042, 1997. Pennington, NJ. Electrochemical Society
Paralo, H. ; Hipler, A.Devi.F. ; Birkner, A. ; Fischer, R.A.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.356-364, 2001. Pennington, N.J.. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.984-989, 1997. Pennington, NJ. Electrochemical Society
Parala, H. ; Devi, A. ; Birkner, A. ; Fischer, R.A.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.429-436, 2001. Pennington, N.J.. Electrochemical Society