1.

Conference Proceedings
Conference Proceedings
1. Aids for driving lithography hard: wafer-level process control features
Fisch,E. ; Bowley,R.R. ; Bruce,J.A. ; Bula,O.
Pub. info.: Optical Microlithography XIV.  4346  pp.1003-1010,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. Inspection and repair of EUV
Fisch,E. ; Kindt,L. ; Lercel,M.J. ; Schmidt,M.R.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.480-485,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562