1.

Conference Proceedings
Conference Proceedings
1. CONSECUTIVE SELECTIVE CHEMICAL VAPOR DEPOSITION OF COPPER AND ALUMINUM FROM ORGANOMETALLIC PRECURSORS
Fine, Stephen M. ; Dyer, Paul N. ; Norman, John A.T.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.329-334,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
2.

Conference Proceedings
Conference Proceedings
2. ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF COPPER FROM A NEW ORGANOMETALLIC PRECURSOR
Fine, Stephen M. ; Dyer, Paul N. ; Norman, John A.T. ; Muratore, Beth A. ; Iampietro, Robert L.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.415-420,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204