1.

Conference Proceedings

Conference Proceedings
Hoeffler, A. ; Feudel, T. ; Strecker, N. ; Fichtner, W.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.75-84,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings

Conference Proceedings
Hegarty, C. ; Feudel, T. ; Hitschfeld, N. ; Ryter, R. ; Streeker, N. ; Westermann, M. ; Fichtner, W.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.565-575,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
3.

Conference Proceedings

Conference Proceedings
Greenlaw, D. ; Burbach, G. ; Feudel, T. ; Feustel, F. ; Frohberg, K. ; Graetsch, F. ; Grasshoff, G. ; Hartig, C. ; Hempel, K. ; Horstmann, M. ; Huebler, P. ; Kirsch, R. ; Kruegel, S. ; Langer, E. ; Pawlowitsch, A.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.42-46,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
4.

Conference Proceedings

Conference Proceedings
Posselt, M. ; Schmidt, B. ; Murthy, C.S. ; Feudel, T.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.453-467,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4