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Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.75-84, 1996. Pennington, NJ. Electrochemical Society
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Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.565-575, 1993. Pennington, NJ. Electrochemical Society
Greenlaw, D. ; Burbach, G. ; Feudel, T. ; Feustel, F. ; Frohberg, K. ; Graetsch, F. ; Grasshoff, G. ; Hartig, C. ; Hempel, K. ; Horstmann, M. ; Huebler, P. ; Kirsch, R. ; Kruegel, S. ; Langer, E. ; Pawlowitsch, A.
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Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.42-46, 2004. Pennington, N.J.. Electrochemical Society
Posselt, M. ; Schmidt, B. ; Murthy, C.S. ; Feudel, T.
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Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.453-467, 1996. Pennington, NJ. Electrochemical Society