1.

Conference Proceedings
Conference Proceedings
1. 100-nm node lithography with KrF?
Ferri,J.E. ; Tyrrell,B. ; Astolfi,D.K. ; Yost,D. ; Davis,P. ; Wheeler,B. ; Mallen,R. ; Jarmolowicz,J. ; Cann,S.G. ; Liu,H.Y. ; Ma,M. ; Chan,D.Y. ; Rhyins,P.D. ; Carney,C. ; Ferri,J.E. ; Blachowicz,B.A.
Pub. info.: Optical Microlithography XIV.  4346  pp.191-204,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. Formulation optimizations for variable DUV resist thickness applications based on the same polymer matrix
Schlicht,K.R. ; Maxwell,B. ; Ferri,J.E. ; Toukhy,M.A.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.618-627,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345