1.

Conference Proceedings
Conference Proceedings
1. Development of silicon microheaters for chemoresistive gas sensors
Brida,S. ; Ferrario,L. ; Giacomozzi,F. ; Giusti,D. ; Guarnieri,V. ; Margesin,B. ; Pignatel,G.U. ; Soncini,G. ; Vasiliev,A.N. ; Verzellesi,G. ; Zen,M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.964-968,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. Optimization of TMAH etching for MEMS
Brida,S. ; Ferrario,L. ; Guarnieri,V. ; Giacomozzi,F. ; Margesin,B. ; Paranjape,M. ; Verzellesi,G. ; Zen,M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.969-976,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Surface and Bulk Properties of Oxygenated FZ Silicon Wafers for Particle Detector Applications
Bellutti,P. ; Boscardin,M. ; Betta,G.-F.Dalla ; Ferrario,L. ; Gregori,P. ; Zorzi,N.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.501-508,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218