Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.235-240, 1987. Pittsburgh, Pa.. Materials Research Society
Downey, Daniel F. ; Daryanani, Sonu L. ; Meloni, Marylou ; Brown, Kristen M. ; Felch, Susan B. ; Lee, Brian S. ; Marcus, Steven D. ; Gelpey, Jeff
Pub. info.:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.299-, 1997. Pittsburgh, PA. MRS - Materials Research Society