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14 results

Conference Proceedings

1. OXYGEN ION IMPLANTATION INTO GERMANIUM

Sjoreen, T. P. ; Ravindra, N. M. ; El-Ghor, M. K. ; Fathy, D.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.137-140, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

2. ELECTRICAL, OPTICAL AND STRUCTURAL PROPERTIES OF THIN SiO2 FILMS ON Si

Ravindra, N. M. ; Russo, O. L. ; Fathy, D. ; Narayan, J. ; Heyd, A. R. ; Vedam, K.

Pub. info.:	SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.169-174, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	105

Conference Proceedings

3. STABILITY OF HEAVILY DOPED Si FORMED BY As+ IMPLANTATION AND RAPID THERMAL ANNEALING

Numan, M.Z. ; Lu, Z.H. ; Chu, W.K. ; Fathy, D. ; Wortman, J.J.

Pub. info.:	Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.31-36, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	52

Conference Proceedings

4. ENCHANGE RATE OF SiO2 GROWTH IN GE-IMPLANTED Si

Fathy, D. ; White, C. W. ; Holland, O,. W.

Pub. info.:	Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.27-34, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	93

Conference Proceedings

5. CHARACTERIZATION OF N-TYPE LAYERS FORMED IN Si BY ION IMPLANTATION OF HYDROGEN

Wilson, S. R. ; Paulson, W. M. ; Krolikowski, W. F. ; Fathy, D. ; Gressett, J. D. ; Hamdi, A. H. ; McDaniel, F. D.

Pub. info.:	Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.287-292, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	27

Conference Proceedings

6. HCl OXIDATION OF HIGH DOSE ARSENIC IMPLANTED SILICON

Choi, Seong Soo ; Numan, M.Z. ; Finstad, T.G. ; Chu, W.K. ; Fathy, D.

Pub. info.:	Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.567-572, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	54

Conference Proceedings

7. ENHANCED OXIDATION OF TiSi2 FILMS BY As+ IMPLANTATION

Holland, O. W. ; Fathy, D.

Pub. info.:	Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.267-272, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	100

Conference Proceedings

8. OXIDATION KINETICS OF Ge+-ION IMPLANTED Si

Holland, O. W. ; White, C. W. ; Fathy, D.

Pub. info.:	SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.271-276, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	105

Conference Proceedings

9. X-ray microanalysis and high resolution imaging of Ge-Au-Ni metal layers on gallium arsenide

Fathy, D. ; Krivanek, O. L. ; Spence, J. C. H. ; Paulson, W. M.

Pub. info.:	Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.. pp.557-562, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	25

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Conference Proceedings

10. Nitrogen ion implatantion in silicon: structure of the subsurface region

Liliental, Z. ; Carpenter, R. W. ; Fathy, D. ; Kelly, J. C.

Pub. info.:	Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.. pp.525-530, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	25

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