1.

Conference Proceedings

Conference Proceedings
Fasching, R.J. ; Tao, Y. ; Prinz, F.B.
Pub. info.: Micromachining and Microfabrication Process Technology IX.  pp.53-64,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5342
2.

Conference Proceedings

Conference Proceedings
Tao, Y. ; Fasching, R.J. ; Prinz, F.B.
Pub. info.: Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA.  pp.431-442,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5389
3.

Conference Proceedings

Conference Proceedings
Bai, S.J. ; Fasching, R.J. ; Prinz, F.B.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.536-542,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
4.

Conference Proceedings

Conference Proceedings
Fasching, R.J. ; Tao, Y. ; Hammerick, K. ; Prinz, F.B.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.128-135,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116