1.

Conference Proceedings
Conference Proceedings
1. SCALPEL mask blank fabrication
Saunders,T.E. ; Blakey,M.I. ; Caminos,C. ; Bogart,G.R. ; Farrow,R.C. ; Knurek,C.S. ; Kornblit,A. ; Liddle,J.A. ; Novembre,A.E. ; Peabody,M.L.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.248-255,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. Techniques to inspect SCALPEL masks
Taylor,D. ; Howard,W.B. ; Kasica,R.J. ; Farrow,R.C. ; Novembre,A.E. ; Caminos,C. ; Knurek,C.S.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.858-864,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission
Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Novembre,A.E. ; Peabody,M.L. ; Saunders,T.E. ; Windt,D.L. ; Zurbrick,L.S. ; Wiley,J.N. ; Aquino,C. ; Hentschel,S.L. ; Davis,L.C. ; Boyer,B.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.221-231,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
4.

Conference Proceedings
Conference Proceedings
4. 200-mm SCALPEL mask development
Bogart,G.R. ; Novembre,A.E. ; Kornblit,A. ; Peabody,M.L. ; Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Knurek,C.S. ; Johnston,I.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.171-177,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings
Conference Proceedings
5. Production of SCALPEL masks in a commercial mask facility
Newport,C.L. ; Parker,J. ; Smith,K.M. ; Benveniste,A. ; Kim,N.-W. ; Reyland,D. ; Farrow,R.C. ; Novembre,A.E. ; Kasica,R.J. ; Knurek,C.S. ; Peabody,M.L. ; Rutberg,L.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.162-170,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
6.

Conference Proceedings
Conference Proceedings
6. Alignment mark detection in CMOS materials with SCALPEL e-beam lithography
Farrow,R.C. ; Waskiewicz,W.K. ; Kizilyalli,I.C. ; Callatin,G.M. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Kornblit,A. ; Ocola,L.E. ; Klemens,F.P. ; Felker,J.A. ; Biddick,C.J. ; Kraus,J.S. ; Blakey,M.I. ; Orphanos,P. ; Merchant,S.M.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.217-226,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
7.

Conference Proceedings
Conference Proceedings
7. Overview of SCALPEL mask technology
Bogart,G.R. ; Novembre,A.E. ; Kornblit,A. ; Peabody,M.L. ; Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Knurek,C.S.
Pub. info.: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.18-19,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3665
8.

Conference Proceedings
Conference Proceedings
8. SCALPEL proof-of-concept system:preliminary lithography results
Waskiewicz,W.K. ; Biddick,C.J. ; Blakey,M.I. ; Brady,K.J. ; Camarda,R.M. ; Connelly,W.F. ; Crorken,A.H. ; Custy,J.P. ; DeMarco,R. ; Farrow,R.C. ; Felker,J.A. ; Fetter,L.A. ; Freeman,R.R. ; Harriott,L.R. ; Huggins,H.A. ; Kasica,R.J. ; Knurek,C.S. ; Kraus,J.S. ; Liddle,J.A.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.255-263,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
9.

Conference Proceedings
Conference Proceedings
9. Overlay error budgets for a high-throughput SCALPEL system
Stanton,S.T. ; Farrow,R.C. ; Gallatin,C.M. ; Liddle,J.A. ; Waskiewicz,W.K.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.543-555,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
10.

Conference Proceedings
Conference Proceedings
10. Mark topography for alignment and registration in projection electron lithography
Farrow,R.C. ; Mkrichyan,M.M. ; Bolen,K. ; Blakey,M. ; Biddick,C. ; Fetter,L.A. ; Huggins,H.A. ; Tarascon,R.G. ; Berger,S.D.
Pub. info.: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California.  pp.143-149,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2723