Using scanning electrochemical microscopy to probe chemistry at the solid-liquid interface in chemically amplified immersion lithography
- Author(s):
LeSuer, R.J. ( Univ. of Texas/Austin (USA) ) Fan, F.-R.F. ( Univ. of Texas/Austin (USA) ) Bard, A.J. ( Univ. of Texas/Austin (USA) ) Taylor, J.C. ( Univ. of Texas/Austin (USA) ) Tsiartas, P. ( Univ. of Texas/Austin (USA) ) Willson, G. ( Univ. of Texas/Austin (USA) ) Conley, W.E. ( International SEMATECH (USA) and Motorola (USA) ) Feit, G. ( International SEMATECH (USA) ) Kunz, R.R. ( MIT Lincoln Labs. (USA) ) - Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 115
- Page(to):
- 125
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.1
- Type:
- Conference Proceedings
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