1.

Conference Proceedings

Conference Proceedings
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
2.

Conference Proceedings

Conference Proceedings
H. Megens ; R. van Haren ; S. Musa ; M. Doytcheva ; S. Lalbahadoersing ; M. van Kemenade ; H. Lee ; P. Hinnen ; F. van Bilsen
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518