1.

Conference Proceedings
Conference Proceedings
1. Subquarter micron optical lithography with practical superresolution technique
T. Ogawa ; M. Uematsu ; F. Uesawa ; M. Kimura ; H. Shimizu
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.772-783,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440
2.

Conference Proceedings
Conference Proceedings
2. Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2
S. Mimotogi ; F. Uesawa ; M. Tominaga ; H. Fujise ; K. Sho ; M. Katsumata ; H. Hane ; A. Ikegami ; S. Nagahara ; T. Ema ; M. Asano ; H. Kanai ; T. Kimura ; M. Iwai
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520