1.

Conference Proceedings
Conference Proceedings
1. Analysis of pattern density on process proximity compensation
S. Jung ; F. Lo ; T. Yang ; K. Chen ; C. Lu
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Variable loading kernels for OPC modeling
S. L. Tsai ; F. Lo ; E. Yang ; T. H. Yang ; K. C. Chen
Pub. info.: Optical Microlithography XXI.  3  pp.69243X-1-69243X-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924