1.

Conference Proceedings

Conference Proceedings
B. Finke ; M. Polak ; F. Hempel ; K. Schroeder ; G. Lukowski
Pub. info.: THERMEC 2011 : International Conference on Processing & Manufacturing of Advanced Materials : processing, fabrication, properties, applications, August 1-5, 2011, Quebec City, Canada.  pp.478-483,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 706-709
2.

Conference Proceedings

Conference Proceedings
J. Roepcke ; S. Glitsch ; F. Hempel ; M. Huebner ; N. Lang ; U. Macherius ; H. Pridoehl ; S. Saβ ; G.D Stancu ; K.-D. Weltmann ; S. Welzel ; H. Zimmermann
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.733-737,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
3.

Conference Proceedings

Conference Proceedings
J. Röpcke ; S. Glitsch ; F. Hempel ; S. Saβ ; K.-D. Schulz ; K.-D. Weltmann ; H. Zimmermann
Pub. info.: 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado.  pp.27-29,  2005.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 48
4.

Conference Proceedings

Conference Proceedings
B. Schulz ; R. Seltmann ; J. Busch ; F. Hempel ; E. Cotte ; B. Alles
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518