1.

Conference Proceedings
Conference Proceedings
1. Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates
J. Maehliss ; A. Abbadie ; F. Brunier ; B.O. Kolbesen
Pub. info.: High Purity Silicon 10.  pp.309-320,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(6)
2.

Conference Proceedings
Conference Proceedings
2. A Review of Different and Promising Defect Etching Techniques: from Si to Ge
A. Abbadie ; J.-M. Hartmann ; F. Brunier
Pub. info.: Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes).  pp.3-19,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 10(1)
3.

Conference Proceedings
Conference Proceedings
3. Comparison of Different Etching Techniques in Order to Reveal Dislocations in Thick Ge Layers
A. Abbadie ; J. Hartmann ; C. Deguel ; L. Sanchez ; F. Brunier ; F. Letertre
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.263-270,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)
4.

Conference Proceedings
Conference Proceedings
4. SOI Metrology and Characterization in Modem Wafer Production
O. Kononchuk ; F. Brunier ; M. Kennard
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.225-234,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)