1.

Conference Proceedings
Conference Proceedings
1. CONTROLLING OF MICROSTRUCTURE GENERATION BY DIRECT HOLOGRAPHIC ETCHING OF SEMICONDUCTOR SUBSTRATES
Toyoda, K. ; Kumagai, H. ; Ezaki, M. ; Obara, M.
Pub. info.: Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.237-242,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 285
2.

Conference Proceedings
Conference Proceedings
2. X-ray phase-shift mask for proximity x-ray lithography with synchrotron radiation
Ezaki, M. ; Murooka, K.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.462-471,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748